Advanced scanning microscopy for nanotechnology techniques by Weilie Zhou

By Weilie Zhou

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10. Schematic of SEM interface. through an RS232 serial computer interface or Ethernet connection, which can be addressed by the operating software. As the technique has developed in automated accuracy and overall speed, the ability to scan the beam over multiple points on the sample to create an OM has become practical, and is now the most common method for a microstructural investigation with EBSD. A map is defined by its location, size, and by the sampling step size between points. In this way, the resolution of the map may be adjusted to reveal the grain structure and grain boundary character, depending on the electron beam resolution under the sampling conditions, time available and 50 Tim Maitland and Scott Sitzman size of the sample area required.

Mitsushima, Y. Kashima, T. Nakadera, and H. Osatake, J. Electron Microsc. , 12 (1989) 146. 15. -R. Peters, J. , 118 (1980) 429. 16. R. P. Apkarian and J. C. Curtis, Scan. , 4 (1981) 165. 17. A. Boyde, Scan. , 11 (1978) 303. 18. T. F. Anderson, NY Acad. , 13 (1951) 130–134. 19. R. P. , 8(2) (1994) 289. 20. -R. Peters, Scan. , 4 (1985) 1519. 21. R. P. Apkarian, 45th Annual Proceedings of the Microscopy Society of America (1987) 564. 22. D. C. Joy, 52nd Annual Proceedings of the Microscopy Society of America (1994).

ECPs were limited to a spatial resolution of about 10 µm; were difficult to implement (the SEM needed the ability to rock the beam about a point without the need for post lens deflection coils); and were slow. Schmidt adapted his general indexing solution for ECP along with the Dingley/Venables CCD technique to create software to index all seven-crystal systems using EBSPs instead. With this, he founded HKL Technology in 1990. In 1992, Schmidt’s colleagues Krieger-Lassen, Conradsen, and Juul-Jensen made one of the most important breakthroughs in the utility of this technique, the 46 Tim Maitland and Scott Sitzman use of the Hough transform.

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